Title: Micro mechanical capacitance type acceleration transducer, and fabricating method
Application Number: 200610118484 Application Date: 2006.11.17
Publication Number: 1959417 Publication Date: 2007.05.09
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: G01P15/125
Applicant(s) Name: Shanghai Inst of Microsystems Address:
Inventor(s) Name: Xiong Bin;Fan Kebin;Che Lufeng;Wang Yuelin
Attorney & Agent:
Abstract:
    A method for preparing acceleration transducer of micromechanical capacity type includes forming rectangular mass block with no lobe compensation on single crystal silicon pellet by utilizing aeolotropic corrosion technique based on elastic beams being alternatively distributed at top and bottom surfaces of active mass block, forming straight elastic beam at two said surfaces of mass block, applying silicon-silicon bond technique to realize bond of three-layers silicon pellet, depositing lead wire pad of top electrode and active electrode and realizing electric signal isolation between two said electrodes.
Time: 9