Title: Optical probe for laser dust particle calculator
Application Number: 90102997 Application Date: 1990.12.05
Publication Number: 1062209 Publication Date: 1992.06.24
Approval Pub. Date: Granted Pub. Date: 1997.04.02
International Classifi-cation: G01N15/06
Applicant(s) Name: Shanghai Optical Precision Machinery Inst., Chines Address: 201800
Inventor(s) Name: Ma Guoxin, Wang Zhijiang
Attorney & Agent: ZHANG ZECHUN LI LANYING
Abstract:
     The invented optical probe used for super-pure detection is composed of mono-mould He-Ne laser instrument and laser expanded beam lens group, optical collecting paraboloid reflector with optical channel, air sample passage which air sample passes through photo-sensitive zone and perpendicular to the laser beam, back sight reflector, collector lens, miscellaneous light elimination grating and mutiplier phototube etc. The invention has the following features: detectable range of dust particle diameter is large, counting efficiency is high, detecting speed is rapid, structural adjustment is convenient, and influence from outside environment is low.
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