Title: MEMS stretching twisted fatigue feature testing apparatus
Application Number: 200610114435 Application Date: 2006.11.10
Publication Number: 1948943 Publication Date: 2007.04.18
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: G01N3/22;G01N3/08;G01M19/00
Applicant(s) Name: Beijing Polytechnical Univ. Address:
Inventor(s) Name: Shang Deguang;Jia Guanhua;Li Lisen;Wang Ruijie;Sun
Attorney & Agent: shenbei
Abstract:
    The invention relates to MEMS drawing torsion fatigue characteristic experimental apparatus. It includes parallel plate capacitance driver and transducer, comb type capacitance driver and transducer, earthed electrode, drawing and torsion driving electrodes, drawing and torsion detecting electrodes. While in experiment, the drawing and torsion driving electrodes are respectively supplied alternating current signal to parallel plate and comb type capacitance drivers to make the fatigue testing specimen suffer alternating drawing and torsion stress at the same time. The parallel plate and comb type capacitance transducers are electrified direct current respectively by drawing and torsion detecting electrodes to detect fatigue testing specimen drawing and torsion amplitude. The invention has the advantages of easy processing, convenient operation, and high use value for MEMS structural strength study.
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