Title: Hartman wavefront sensor with passive alignment function and testing method thereof
Application Number: 200610165079 Application Date: 2006.12.13
Publication Number: 1963433 Publication Date: 2007.05.16
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: G01M11/00;G01M11/02;G01M19/00;G01J9/00;G01B11/00;G02B27/00
Applicant(s) Name: Institute of Optics and Electronics, Chinese Acade Address:
Inventor(s) Name: Li Huaqiang;Rao Xuejun
Attorney & Agent: jiayu zhong luji
Abstract:
    This invention relates to one Hageman wave sensor and its test method to realize calibration function, which adds rough and accurate calibration parts in traditional system, wherein, the rough part comprises the image screen with holes, split parts, rough calibration detection system and accurate calibration part comprises focus lens, accurate calibration split lens and detection system. After incidence beam through rough and accurate calibration steps, it rapidly enters micro lens measurement field to improve Hageman system measurement accuracy.
Time: 11
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