Title: Electromagnetic-magnetoelectric type micro mechanical resonant beam structure
Application Number: 200610114274 Application Date: 2006.11.03
Publication Number: 1944235 Publication Date: 2007.04.11
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: B81B7/02;B81B3/00;B06B1/04;B81C1/00;G01L1/10
Applicant(s) Name: Beijing Univ. of Aeronautics and Astronautics Address:
Inventor(s) Name: Pan Shangchun;Xing Weiwei;Cai Chenguang
Attorney & Agent: jiayu zhong luji
Abstract:
    The electromagnetic-magnetoelectric micro mechanical resonant beam structure consists of matrix and resonant beam in magnetic field, and the composite sensitive structure comprising elastic matrix membrane and double-ended built-in simple resonant beam realizes the resonant measurement of physical quality. Both the matrix and the resonant beam are made with SOI wafer and through epitaxial and etching process, and the matrix with low doping and the simple resonant beam of N type doping in 1x10
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