Title: Static pressure influence compensation method of capacitive differential pressure sensor
Application Number: 200610134139 Application Date: 2006.11.03
Publication Number: 1948933 Publication Date: 2007.04.18
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: G01L13/06;G01L19/00;G01L1/14;G01L9/12
Applicant(s) Name: Shenyang Inst. of Instrument Sci. Address:
Inventor(s) Name: Zhang Zhiguo;Kuang Shi;Chen Xinqi;Li Ying;Liu Qin
Attorney & Agent: cuigong mei
Abstract:
    The invention relates to capacitance differential pressure transducer static pressure influence compensating process. It connects the transducer with switching circuit and processing circuit to form differential pressure transmitter. Its features are as follows: while testing transmitter static pressure influence error vale, compensating a fixed capacity value and increasing equivalent capacitance value to compensate extra static pressure influence; confirming compensating capacitance Cb value according to formula Cb=C2*delta C1/ delta C2-C1 and Cb=C1*delta C2/ delta C1-C2; when the static pressure influence is negative value, parallel connecting capacitance Cb with transducer C2; when it is positive value, parallel connecting with the transducer C1; selecting standard capacitance to ensure deviation is less than 0.1 PF for computing Cb. The method has the advantages of simple operation, low cost, greatly increasing capacitive transducer quality price ratio, and good for its volume production.
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