Title: Micro-geometric sense measuring device based on nano-measuring machine and micro-tactometering head
Application Number: 200610129814 Application Date: 2006.12.04
Publication Number: 1975322 Publication Date: 2007.06.06
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: G01B11/00;G01B11/02;G01B11/24;G01B9/02;G01B7/00;G01B7/02;G01B7/28;G01L1/14;G01L1/18;G01L1/24;G01N13/
Applicant(s) Name: Tianjin Univ. Address:
Inventor(s) Name: Li Dachao;Li Yuan;Zhao Dabo;Fu Xing;Hu Xiaotang
Attorney & Agent: jiangtian hua
Abstract:
    This invention disclosed a measuring equipment which consists of a nanometer measuring machine and a tiny feeling gauge head. The feeling gauge head was fixed on the machine by a plank. The measuring range of scanning probe micro-technique was improved by this equipment, the range of object by other measuring means was widened; it could manage to measure some micro-geometric senses including dimension, displacement, etc. The measuring precision was improved by this equipment.
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