Title: Monolithic integrated sensor chip for measing three parameters of pressure difference, absolute pressure and temperature and its making process
Application Number: 200610134820 Application Date: 2006.12.15
Publication Number: 1974372 Publication Date: 2007.06.06
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: B81B7/02;G01L1/18;G01K7/16;B81C1/00;B81C3/00;B81C5/00
Applicant(s) Name: Shenyang Inst. Instrument Science Address:
Inventor(s) Name: Tang Hui;Chen Xinqi;Li Changchun;Zhu Yongfeng
Attorney & Agent: cuigong mei
Abstract:
    The monolithic integrated sensor chip for measuring three parameters of pressure difference, absolute pressure and temperature has the chip structure including sensing resistor, silicon membrane and glass substrate. It features its relatively independent pressure difference sensing unit and absolute pressure sensing unit, and silicon resistor for sensing temperature to form the temperature sensing unit together with the electrodes and welding pad. The present invention features the technological compatibility of the making process, the pressure difference sensing unit and the absolute pressure sensing unit operating on the piezoresistance effect of the silicon material, and the temperature sensing unit operating on the heat-resistance effect of the silicon material. The three parameter sensor of the present invention has reliable performance and low cost, and may be batch produced.
Time: 9
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