Title: Lightbeam measuring device
Application Number: 200610088699 Application Date: 2006.06.01
Publication Number: 1877270 Publication Date: 2006.12.13
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: G01J9/02,G01B9/02
Applicant(s) Name: Fujinon Corporation Address:
Inventor(s) Name: Ge Zongtao, Saito Takayuki, Kurose Minoru, Kanda H
Attorney & Agent: li xianglan
Abstract:
     The invention provides the light beam measuring device. The light beam measuring device (1A) has wave front measurement component (10A) and light spot characteristic measuring device (10B). The wave front measurement component (10A) has reflection-type wave front shaping unit (20), light beam separated/synthesized surface (15), deflector plate (17) and Michelson-type optical system. The first optical distance, which is reflected by reflecting surface (17a) from light beam separated/synthesized surface to light beam separated/synthesized surface, is consistent with the second optical distance, which is reflected by wave front shaping unit (20) from light beam separated/synthesized surface to light beam separated/synthesized surface, so the invention can carry out wave front measurement and light spot characteristic measurement. It is easy to adjust the optical system and set the phase shift structure.
Time: 8
<- Previous Patent:Optical sensor   |  Next Patent:Method and apparatus for measurin... ->