Title: Micro integrated grating spectrograph based on blazed grating and thermopile detector and method for making same
Application Number: 200610027341 Application Date: 2006.06.07
Publication Number: 1865923 Publication Date: 2006.11.22
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: G01N21/25,G01J3/18
Applicant(s) Name: Shanghai Institute of Microsystem and Information Address: 200050
Inventor(s) Name: Li Tie, Wang Yi, Zhou Hong, Wang Yuelin, Lin Xinru
Attorney & Agent: pan zhen
Abstract:
     The related micro integrated grating spectrograph based on blazed grating and hot stack detector comprises: a cover board with a through hole with both erosive surfaces and a shallow slot, a hot stack array chip with frame to support whole film structure and a hole opposite to the one on cover, and a grating chip with a blazed grating eroded as a special crystallographic direction. This invention uses MEMS technology and different bonding ways has small volume and stable structure with low cost.
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