Title: Preware measuring method based on linear phase position reversal development
Application Number: 200610089149 Application Date: 2006.08.07
Publication Number: 1904569 Publication Date: 2007.01.31
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: G01J9/00
Applicant(s) Name: Inst. of Photoelectric Technology, CAS Address:
Inventor(s) Name: Li Xinyang;Li Min
Attorney & Agent: guan ling cheng jinyu
Abstract:
    The invention relates to a kind of wave front measure method basing on the linearity phase conversion. It calibrates to get the recovery matrix of the corresponding relation between the relative change values of the sensor far field light intensity and the coefficient in the incidence wave front, according to the parameters of the wavelength of the lamp-house, the focus of the sensor, the image element of the imaging device and so on. The sensor is calibrated by non-astigmation ideal plane before used. The non-astigmation far field image is regarded as the base image. Measure the incidence beam containing the aberration wave front to get the far field image in this condition. It detracts the base image to get the D-value of the light intensity distribution and form light intensity D-value as predefined. The recovery matrix multiplies the light intensity D-value to get the coefficient of the aberration wave front. The invention possesses the advantages of high energy utilization ratio, little calculation and rapid calculating speed. It can be applied in the high real-time requirement field, for example, self-adaptation optics.
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