Title: Light amount measuring apparatus and light amount measuring method
Application Number: 200610152287 Application Date: 2006.09.27
Publication Number: 1940511 Publication Date: 2007.04.04
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: G01J1/00;G01N21/64
Applicant(s) Name: Yokogawa Electric Corp. Address:
Inventor(s) Name:
Attorney & Agent: chenyuan zhangtian shu
Abstract:
    A zero point adjustment is performed by generating no signal state of a CCD camera. A state in which stray light does not enter the CCD camera is ensured by a calibration shutter. An output signal of the CCD camera is transmitted to a light amount calculator, and a calibrating section executes a calibration for the light amount calculator by using an output signal value as a reference (zero point). Further, light outputted from a laser light source is attenuated by an optical attenuator and is made to be incident on the CCD camera. By switching an attenuating amount of the optical attenuator, correctly set light is made to be incident on the CCD camera. The output signal of the CCD camera is transmitted to the light amount calculator, and the calibrating section executes the calibration such that values of the respective output signals correctly correspond to respective light amounts.
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