Title: Backward integrated micro-lens infrared focal plane detector and micro-lens producing method
Application Number: 200610117106 Application Date: 2006.10.13
Publication Number: 1933149 Publication Date: 2007.03.21
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: H01L25/00;H01L25/18;H01L27/14;H01L21/00;G01J1/42;G02B3/00
Applicant(s) Name: Shanghai Inst. of Technical Physics Address:
Inventor(s) Name:
Attorney & Agent: tianshen rong
Abstract:
    This invention relates to a trailing integrated micro-lens infrared focal plane detector and a preparation method for micro-lenses, in which, said detector includes: infrared photosensitive meta-array chips, a read-out circuit, a blending mutual-connected indium post and a micro-lens array, which is processed by micro-mechanism at the back of the substrate of the array chip applying an etching method to the positive pattern of a memory focal plane detection chip and a plasma combined etching technology, and the optical shafts of the trailing integrated micro-lens are coincident with the photosensitive face central normal of the corresponding photosensitive pixels.
Time: 10