Title: Infrared ray sensing element and method of producing the same
Application Number: 200610145169 Application Date: 2006.11.15
Publication Number: 1967181 Publication Date: 2007.05.23
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: G01J5/12;G01J5/14;H01L35/00;H01L37/00
Applicant(s) Name: Nissan Motor Address:
Inventor(s) Name: Ohta Yoshimi;Hirota Masaki
Attorney & Agent: liuxin yu zhanghui hua
Abstract:
    Infrared ray sensing element and method of producing the same are provided. The infrared ray sensing element includes: a semiconductor substrate; an infrared ray receiver disposed above the semiconductor substrate in such a manner as to be isolated from the semiconductor substrate, the infrared ray receiver being configured to receive an infrared ray; and a beam configured to support the infrared ray receiver to the semiconductor substrate and include a thermopile configured to sense a temperature increase of the infrared ray receiver, wherein one of the beam and the thermopile has a cross sectional shape that includes at least one protruding part.
Time: 8
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