Title: Hartmann wavefront sensor with active alignment function and detection method therefor
Application Number: 200610165078 Application Date: 2006.12.13
Publication Number: 1971232 Publication Date: 2007.05.30
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: G01M11/00;G01M11/02;G01M19/00;G01J9/00;G01B11/00;G02B27/00
Applicant(s) Name: Institute of Optics and Electronics, Chinese Acade Address:
Inventor(s) Name: Li Huaqiang;Rao Xuejun;Jiang Wenhan;Xian Hao;Yang
Attorney & Agent: jiayu zhong luji
Abstract:
    The Hartman wave front sensor with active aligning function and its detecting method are disclosed, two parts of rough alignment and accurate alignment are added to the original system, the part of rough aligning includes: aligning light source, imaging screen with holes, moving reflecting mirror, detecting system; the part of accurate alignment includes: focusing lens, beam splitter, detecting system. The aligning light source system could align the workpiece to be detected and the light axis of Hartman system quickly, the incident beam enter the measuring visual field of the lens array to improve the measurement accuracy of Hartman system; the positive lens, negative lens, convex mirror, cancave mirror and flat mirror could be detected easily by the Hartman wave front sensor. The invention can display the adjusting result timely, it has audio-visual and understandable characters to reduce the requirements for users and decrease the adjusting time; the components used in the invention have low requirement for specification and cheap price, it
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