Title: Tunnelling resonance microsound sensor
Application Number: 200510012815 Application Date: 2005.09.12
Publication Number: 1746638 Publication Date: 2006.03.15
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: G01H11/08,G01H11/06
Applicant(s) Name: Zhongbei Univ. Address: 030051
Inventor(s) Name: Zhang Wendong, Liu Jun, Xiong Jijun, Xue Chenyang,
Attorney & Agent: zhu yuan
Abstract:
     A resonant tunneling micro sound transducer is prepared as fabricating out resonant tunneling piezo – resistance on super lattice film, fabricating super lattice film substrate to be force transmission structure of indent resonant cavity and setting four resonant tunneling piezo – resistances on edge of indent resonant cavity. The said transducer is actually a quantum component prepared by MEMS process.
Time: 6
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