Title: Phase-lock closed loop system of resistance vibration pickup type silicon micro mechanical resonant sensor
Application Number: 200610012108 Application Date: 2006.06.06
Publication Number: 1858564 Publication Date: 2006.11.08
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: G01H11/08,H03L7/08,H03L7/093
Applicant(s) Name: Beijing Univ. of Aeronautics and Astronautics Address: 100083
Inventor(s) Name: Fan Shangchun, Cai Chenguang
Attorney & Agent: liu xiujuan cheng jinyu
Abstract:
     This invention relates to a phase-locking close-loop system of vibration pick up silicon micro-mechanical resonance sensors, in which, a sensitive structure vibration pick up resistor, a loop filter and a voltage-controlled oscillator compose a phasae-locking loop and the vibration pick-up resistor is taken as the phase discriminator of the phase-locking loop to output signals to be amplified, filtered and integrated by a loop filter to act on the voltage-controlled oscillator, the output signals of which are taken as the reference signals of the vibration pick up resistor and as the exciting signals of the exciting elements in the sensitive structure after being amplified by an exciting amplifier. In the system, the vibration pick up resistor replaces the phase discriminator in the phase-locking loop to simplify the close-loop circuit of a vibration pick up silicon micro-mechanical resonance sensor.
Time: 10
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