Title: Digital phase-locked closed-loop of resistance vibration pickup type silicon micromechanical resonant sensor
Application Number: 200610089391 Application Date: 2006.06.23
Publication Number: 1866747 Publication Date: 2006.11.22
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: H03L7/18,G01H11/06
Applicant(s) Name: Beijing University of Aeronautics Address: 100083
Inventor(s) Name: Fan Shangchun, Cai Chenguang
Attorney & Agent: guan ling cheng jinyu
Abstract:
     The invention discloses a digital phase-locked closed-loop of resistance pick-up type silicon micro mechanical resonant transducer, which comprises the following parts: low-pass filter, analog-digital converter, microprocessor, direct digital compound reference signal source, direct digital compound pumping signal source and driver amplifier, wherein the signal outputted by pick-up shake resistance of sensitive structure is enlarged and filtered by electric filter, then the signal is transformed into digital signal by analog-digital converter and sent to the microprocessor; the microprocessor controls sine signal which is outputted by pumping signal from direct digital; the sine signal is enlarged by driver amplifier, which drives resonator as pumping signal of driven element.
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