Title: Vibration measuring device based on micro opto-electromechanic system
Application Number: 200610114279 Application Date: 2006.11.03
Publication Number: 1945237 Publication Date: 2007.04.11
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: G01H9/00
Applicant(s) Name: Beijing Univ. of Aeronautics and Astronautics Address:
Inventor(s) Name: Yin Xiaosu;Li Rui;Xiao Wen;Liu Dewen;Liu Yang;Han
Attorney & Agent: jiayu zhong luji
Abstract:
    The vibration measuring device based on micro opto-electromechanical system consists of one micro opto-electromechanical system to sense the vibration and one signal processing circuit. The micro opto-electromechanical system consists of one single detecting optical fiber and one vibration sensing membrane on the silicon substrate. The vibration signal is sensed with the vibration sensing membrane, read out and conducted to the signal processing circuit with the detecting optical fiber, and processed through photoelectronic conversion, amplification, filtering and signal extraction to obtain the vibration signal. The micro structural elements are formed through etching the semiconductor substrate and have raised detecting capacity. The sensing part of the detecting device has size reduced to the same order as the optical fiber and possesses the advantages of low power consumption, simple structure and easy realizing.
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