Title: Resonant silicon micro mechanical sensor with auxiliary sensitive unit
Application Number: 200610165574 Application Date: 2006.12.22
Publication Number: 1987364 Publication Date: 2007.06.27
Approval Pub. Date: Granted Pub. Date:
International Classifi-cation: G01D5/00;G01D5/12;G01D5/16;G01H11/06;G01H11/08;B81B7/02
Applicant(s) Name: Beijing Univ. of Aeronautics and Astronautics Address:
Inventor(s) Name: Fan Shangchun;Xing Weiwei;Cai Chenguang;Zhuang Hai
Attorney & Agent: jiayu zhong luji
Abstract:
    The disclosed sensor is composed of primary sensing structure (PSS), resonance beam, voltage - resistor network as assistant sensing unit, and signal processing unit (SPU). Through PSS, the measured quantity is mapped to resonance frequency (RF) of the resonance beam. SPU detects pick-up signal output from the resonance beam, and outputs drive signal to the resonance beam so as to constitute closed-loop system. RF is calculated from the pick-up signal. The measured quantity is obtained from RF based on PSS and resonance beam model. Through PSS, the measured quantity is mapped to numerical value of each resistance in voltage - resistor network. SPU detects numerical value of each resistance, and obtains estimated value of RF of resonance beam. The said estimated value is in use for assisting detection of the pick-up signal, calculating RF, and generating drive signal. The invention is capable of detecting small signal, improving dynamic response and reliability of sensor system.
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